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- 全てを見る - 九州大学
2014年6月15日 ... T. Ishihara, T. Hori, K. Kakizaki, Kiichiro Uchino,ArF Excimer Laser Operated at
10 kHz for Small Electrode Separations,レーザー研究,Vol. 41, No ... More Info....
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- FULL TEXT (PDF, 28609KB)
input power for 10 mm electrode separation and Xe gas pressures 24 torr. ... light
source becomes small in size, and RF preionized plasma does not .... We discuss
the possibility of operation of ArF excimer lasers at repetition of more than 6 kHz,
based on experimental results and numerical simulations. 1. Introduction. More Info....
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- 7 - レーザー学会
ArF Excimer Laser Operated at 10 kHz with Small Electrode Separations ... OPIC
The 2nd Advanced Lasers and Photon Sources '13（ALPS '13）開催報告. More Info....
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- UV Laser Processing for Semiconductor Devices - Wiley Online ...
Highly flexible laser-assisted fabrication for gallium nitride based devices. Olaf
Krüger ... assisted die separation of GaN-based lasers ... etition frequencies of up
to 100 kHz, ... type ensures reliable operation as well as ... excimer gas in use,
argon fluoride (ArF) ... less than 10 % of the DPSS laser beam ..... Smaller dies
were. More Info....
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- Gas Lasers - WorldOfLasers.com
For efficient operation, the population of the final state in the laser transition
should be ... An additional benefit of the small tube diameter is that the emission
is ..... Since the electrode separation is only a few millimeters, it acts as a bore of
..... used excimer lasers are krypton fluoride (KrF, 248 nm), argon fluoride (ArF,
193 ... More Info....
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- Laser fabrication and assembly processes for MEMS - Imperial ...
~10 ns a few mJ up to kHz fs Ti:sapphire. 775 nm. ~150 fs. ~1 mJ up to kHz ...
focuses mainly on ArF (193 nm) and KrF (248 nm) excimer lasers, which have
been used for ... These attributes make excimer lasers generally better suited
than ... lower pulse energy with much higher beam quality, and so tend to be
operated in. More Info....
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- FAQ 4 - World Of Lasers
What are the important properties of excimer lasers? .... of the other components
like mirrors, windows, electrodes etc. present in the chamber. Thus the challenge
in making HeCd lasers operate continuous-wave (CW) is dealing with
cataphoresis. .... Theses lasers are also used to drill small precision holes (5 - 10
micron) in ... More Info....
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- Single Photon Ionization (SPI) via Incoherent VUV-Excimer Light ...
(VUV) light sources for SPI-MS are based either on lasers ... instrumentation,
which combines a separation method with ..... depth leads to a small, bright,
almost spherical VUV-light-emitting ... ArF* radiative excimer decay. 193. 6.4. ∼
10. 2 a Percentage of the electron energy deposited in the rare gas that is
converted into ... More Info....
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- The dielectric barrier discharge: A bright spark for Australia's future
It generally operates at gas pressures ranging from 100 mbar to a few ... a wide
range of driving frequencies ranging from single pulse to 100 kHz or more. ... of
thin ifims by laser chemical vapour deposition using excimer lasers to provide the
..... is of the order of 10-100 ns and with a typical electrode separation of 1 cm,
gas ... More Info....
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- Poster Session Abstracts Japan-US Workshop on the Future of ...
because of their simpler structure and smaller size compared to conventional ...
proportional to P(O2)1/6 in wide range (10-13 -105 Pa). ... Preparation and
Characterization of buffer for DNA electrophoresis separation ..... kHz and 1 MHz.
... Recently, we have developed the excimer laser assisted metal organic
deposition. More Info....
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- Construction and operation of high power gas lasers - Springer
In the present paper some typical gas laser construction and their .... for P = 0 and
I --- 10 is the dynamic resistance, ... to be approximately in a range of typical
modulation frequencies up to 1 kHz. ... over an area equal to the length of the
electrodes times their separation distance. .... Table top e-beam pumped excimer
lasers. More Info....
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- 1
ized F2 laser of the fast-discharge type to measure the small signal gain by the ...
the electrodes of 10 mm, providing stable discharge even at higher gas pressure
... Laser operation at repetition rates up to 1 kHz without signs of power ...... by the
ArF excimer laser at 193 nm (and at other excimer and dye lasers wave. More Info....
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- Sintec Optronics Pte Ltd - Sintec Optronics Technology Pte Ltd
operated, extensive research and development have been undertaken ... often
the pulsed lasers such as pulsed TEA CO2 laser, excimer laser, and .... area by
mask marking is very small because of limited beam spot size and ..... typical
YAG laser rod is a cylinder of 50 to 150 mm long and 4 to 10 mm .... A 3 kHz XeCl
. More Info....
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- Fabrication and Characterization of Micro ... - ETH E-Collection
attention in the sector of small power supplies for portable applications such as
notebooks, ... The application of structured glassy carbon as electrodes offers the
... ing in the kHz range. ... ArF (λ= 193 nm) and XeCl (λ= 308 nm) excimer lasers
were evaluated for the ...... This separation of charges is essential for the
operation. More Info....
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- Volume 278 - ScienceDirect
Nanocomposite Ga2Ox (<2.3) films are obtained by phase separation ... were
deposited; ▻ For targets ablation a fs laser at 1 kHz repetition rate was used; ....
Nano-second (excimer ArF) and femto-second (Ti:Sapphire) laser have been
compared. ... electrode layers with high specific surface were produced by pulsed
laser ... More Info....
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